Biography

R&D manager surface and bulk MEMS micromachining inorganic sacrificial layers, low temperature direct wafer bonding, DUV coatings. Spezialgebiete: - MEMS/ MOEMS (Surface Micromachining) - Large-area Reactive Magnetron Sputtering - PhD thesis about Pulsed Magnetron Sputtering - Optical Inspection - Design and Application of Coatings for Glass - Plasma Emission Monitoring

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Research Interest

MEMS/MOEMS